Refurbished MOCVD Reactor Setup
Budget: $100,000 – $0 USD
The task is to take a fully-refurbished G3 MOCVD reactor that is already on site and bring it into full operational service inside my industrial facility. Mechanical placement, alignment, and anchoring are complete; the remaining work centres on integration, commissioning, and validation.
Integration requirements
• Tie the reactor into the existing high-purity gas delivery cabinet (H₂, NH₃, group-III precursors) without disturbing live lines.
• Connect to our dedicated 3-phase 480 V electrical feed and verify all interlocks, earths, and breakers.
• Interface cooling-water, exhaust, and scrubber ducts to match current plant standards.
Commissioning & acceptance
• Run leak checks (helium mass-spec) on every new joint.
• Calibrate MFCs, pressure gauges, and thermocouples; confirm temperature uniformity across the susceptor.
• Execute a dry-run recipe followed by a GaN epitaxy test wafer. Stable growth rate within ±3 % and background pressure <1 × 10⁻⁵ Torr will mark acceptance.
• Deliver a concise hand-over report containing wiring diagrams, gas hookup schematics, safety certificates, and the final process log.
Tools on hand: AIXTRON service kit, helium leak detector, Fluke ScopeMeter, and complete OEM manuals. Feel free to bring any additional specialty gauges or alignment fixtures you prefer; floor space, crane access, and cleanroom garments are provided.
Timeline is flexible within the next sixteen weeks, but once work begins I would like commissioning wrapped up inside five consecutive days to minimise downtime on adjoining tools.
Integration requirements
• Tie the reactor into the existing high-purity gas delivery cabinet (H₂, NH₃, group-III precursors) without disturbing live lines.
• Connect to our dedicated 3-phase 480 V electrical feed and verify all interlocks, earths, and breakers.
• Interface cooling-water, exhaust, and scrubber ducts to match current plant standards.
Commissioning & acceptance
• Run leak checks (helium mass-spec) on every new joint.
• Calibrate MFCs, pressure gauges, and thermocouples; confirm temperature uniformity across the susceptor.
• Execute a dry-run recipe followed by a GaN epitaxy test wafer. Stable growth rate within ±3 % and background pressure <1 × 10⁻⁵ Torr will mark acceptance.
• Deliver a concise hand-over report containing wiring diagrams, gas hookup schematics, safety certificates, and the final process log.
Tools on hand: AIXTRON service kit, helium leak detector, Fluke ScopeMeter, and complete OEM manuals. Feel free to bring any additional specialty gauges or alignment fixtures you prefer; floor space, crane access, and cleanroom garments are provided.
Timeline is flexible within the next sixteen weeks, but once work begins I would like commissioning wrapped up inside five consecutive days to minimise downtime on adjoining tools.