A matlab simulation model
Budget: $30 – $250 USD
I am looking for people to build me a simple matlab simulation model for virtual metrology in Back end of the line semiconductor manufacturing process.
The simulation should include
Dielectric layer (SiO2) deposition using CVD
Photoresist for Metal 1 trench etching
Metal 1 trench etching
Metal 1 deposition using CVD
Excess metal is removed using CMP
Dielectric layer (SiO2) deposition using CVD
Photoresist for Metal 2 Via Hole etching
Metal 2 Via Hole etching
Formation of metal 2 trench pattern
Metal 2 deposition using CVD
Metal 2 polishing.
The blocks should include process tools and process parameters the target is the metrological measurements in the semiconductor wafer.
The process tools to be used are
Photolithography tool
Plasma Etch tool
Chemical vapour deposition (CVD) tool
Chemical metal polishing (CMP)
The parameters in each should vary 5, 7 and 10%.
For each simulation and then has to be compared.
Thanks
Please contact if needed more info
Dead line 2 to 4 days
Budget $100 to $200
The simulation should include
Dielectric layer (SiO2) deposition using CVD
Photoresist for Metal 1 trench etching
Metal 1 trench etching
Metal 1 deposition using CVD
Excess metal is removed using CMP
Dielectric layer (SiO2) deposition using CVD
Photoresist for Metal 2 Via Hole etching
Metal 2 Via Hole etching
Formation of metal 2 trench pattern
Metal 2 deposition using CVD
Metal 2 polishing.
The blocks should include process tools and process parameters the target is the metrological measurements in the semiconductor wafer.
The process tools to be used are
Photolithography tool
Plasma Etch tool
Chemical vapour deposition (CVD) tool
Chemical metal polishing (CMP)
The parameters in each should vary 5, 7 and 10%.
For each simulation and then has to be compared.
Thanks
Please contact if needed more info
Dead line 2 to 4 days
Budget $100 to $200
Related categories:
Engineering
Matlab and Mathematica
Mechanical Engineering
Electrical Engineering
Semiconductor